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Erdem Alaca - MEMS Flow Sensor


The technology of micro- and nanoelectromechanical systems (M/NEMS) enables the creation of small force sensors that accurately measure forces in the micro-newton and sub-micro-newton ranges. Piezoresistive sensors have gained popularity due to their relative immunity to electrostatic forces, simple read-out circuitry, lower noise, ease of scaling up and integration, and potential for miniaturization. The fabricated NEMS force sensor uses piezoresistive silicon nanowires to detect multi-axis forces in the micro-newton range. Through an Arduino-based setup, we will explore the flow-sensing capabilities of these sensors, characterizing them through current-voltage measurements and analyzing their electromechanical and thermal behavior.